FormFactor FRT Metrology

COMPAMED 2015

hall 8a, booth G19.5

FRT is one of the world wide leading suppliers in the field of 3D surface metrology systems for research and production.The measurement systems of FRT provide
non-contact, non-destructive and also fully automated data about the topography, roughness, thickness etc. Due to its versatility and flexibility the MicroProf of FRT has established itself to a standard system in modern surface metrology. Due to the unique multi sensor technology the MicroProf can be applied and equipped universally. Diverse tasks can be measured together in one device. Come and visit us and see how easy it is!

FormFactor FRT Metrology manufactures 3D surface measurement technology for research and production. Our high-precision measuring instruments are based on SurfaceSensTM multi-sensor concept and are equipped with in-house developed software.

The multiple award-winning measuring systems provide (also fully automatically) information about topography, step height, roughness, layer thickness and many other parameters, contact-free and non-destructive. Depending on the application, different measuring methods can be combined with point, line, area and layer thickness sensors and atomic force microscopy in one measuring instrument - measuring ranges can vary from meters to sub-nanometers. The FormFactor FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.

FormFactor, Inc. is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.

Products

non-contact profilometer, confocal microscope, multi-sensor technology, automation technology
Non-contact surface metrology, defect inspection, multi-sensor technology, fully automatic measuring devices, thickness measurement, topography measurement, coating thickness measurement, distance sensors, coating thickness sensors, spectrometers, confocal microscopes, white light interferometers, atomic force microscopes